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Description
This module introduces the technologies, production methods and application areas of microsystems, also known as micro electromechanical systems (MEMS). Basic design issues are discussed and the differences between processing for microsystems and processing for microelectronics are described. Mechanical, thermal, magnetic, chemical and biological microsystems are covered, each illustrated by examples of their applications.
The module can be studied on its own or as part of a programme leading to a qualification.
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This module introduces the technologies, production methods and
application areas of microsystems, also known as micro
electromechanical systems (MEMS). Basic design issues are discussed
and the differences between processing for microsystems and
processing for microelectronics are described. Mechanical, thermal,
magnetic, chemical and biological microsystems are covered, each
illustrated by examples of their applications.
The module can be studied on its own or as part of a programme
leading to a qualification.
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